A. Equipment overview

1.1 Application fields: Single piece cleaning and drying machine is a high cleanliness cleaning and drying equipment, with the characteristics of liquid corrosion, pure water cleaning, high-speed drying, nitrogen drying and so on. Different wafer sizes can be achieved by quickly changing the drying head. It is the main equipment of wet cleaning process, small size and smooth operation. It is mainly used for the cleaning and drying process of 2-8 inch semiconductor wafers, mask plates, various substrates and other materials. It has the advantages of low cost, fast application and production.

1.2 Name: Single piece cleaning and drying machine

1.3 Model: QSG-150-2Y

B.  Main structural features

Single piece cleaning dryer main servo motor, PLC controller, man-machine interface, high clean valve, PFA tube, nitrogen heater, anti-corrosion shell, and spin dry and other parts.

2.1 Material: Imported PP board, can meet the clean room working environment.

2.2 Special servo motor, can achieve 10-3000 RPM, low speed uniform cleaning, high speed centrifugal drying.

2.3 Industrial PLC controller and man-machine interface, stable and reliable control of each component, intuitive and visual operation mode.

2.4 High-power nitrogen heater, fast heating nitrogen, improve drying efficiency.

2.5 Drying head details can be customized according to customer needs for different sizes of drying head.

2.6 It can be configured with multiple groups of liquid medicine flushing, and has the function of liquid medicine suction.

C. Main technical parameters